【Overview】
Semiconductors, integrated circuit chip and packaging, LCD, high-precision circuit board, photoelectric devices, various electronic devices, micro-electronics industry, large-scale, ultra-large scale integrated circuits requires large amounts of high water, ultrapure water to wash semi-finished and finished products. The higher integration of integrated circuits, the more narrow width, the higher the water quality requirements。(General requirements for ultra-pure water resistivity 18.2MΩ.cm (25 ℃), TOC <5ppb, Bacterial Endotoxin <0.03EU/ml) that the electronics industry pure water, ultrapure water treatment system, ease of use of technology and its products Degree of automation, continuity, sustainability made more stringent requirements.
【National standards】(GB/T11446.1-1997)
At present, China Ministry of Electronics Industry of the electronic water-level is divided into five industry standard technology, namely 18MΩ.cm, 15MΩ.cm, 10MΩ.cm, 2MΩ.cm, 0.5MΩ.cm, to distinguish between different water quality。
China National Electronics Ultra pure water specifications GB/T11446.1-1997
|
Resistivity 25℃ |
Si≤μg/L |
Co≤μg/L |
Zi≤μg/L |
Ni |
Na≤μg/L |
K≤μg/L |
Cl≤μg/L |
>1μm Particles ≤个/ml |
Bacteria ≤个/ml |
Nitrate |
Phosphate |
Sulfate |
TOC |
EW-I |
≥18* |
2 |
0.2 |
0.2 |
0.1 |
0.5 |
0.5 |
1 |
0.1 |
0.01 |
1 |
1 |
1 |
20 |
EW-II |
≥15 ** |
10 |
0 |
0 |
1 |
2 |
2 |
1 |
5 |
0.1 |
1 |
1 |
1 |
100 |